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MEMSnet Home: MEMS-Talk: etching silicon with RCA
etching silicon with RCA
2003-03-25
thierry.bouchet
2003-03-26
St.Clair, Loren
2003-03-27
thierry.bouchet
etching silicon with RCA
thierry.bouchet
2003-03-25
I have a problem with this procedure RCA:
HNO3
Rinse H2O
NH4OH + H2O + H2O2

the silicon is etched and i see some white large area ?

Why ?


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