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MEMSnet Home: MEMS-Talk: Ti attack by KOH
Ti attack by KOH
2003-03-25
Roger Shile
2003-03-26
Kirt & Erika Zipf-Williams
2003-03-28
Roger Shile
2003-03-27
Jason Viotty
Ti attack by KOH
Roger Shile
2003-03-25
Can someone tell me if titnanium can be used as an adhesion layer for gold when
the metalization will be subjected to a long KOH etch?
In my experience, chemistries that etch Si, such as HF and fluorine based
plasmas, will also etch Ti.  I therefore suspect that KOH will etch Ti, but
haven't found any published data.

Roger Shile
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