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dc sputtering
2003-04-02
Lakshmi Abhiram
dc sputtering
Lakshmi Abhiram
2003-04-02
hi all, did anyone work on dc sputtering(not the magnetron dc sputtering)?
could one of you let me know the readings of the gas pressure,voltage and
current,gas flow rate that you maintained at for a normal deposition.

thank you.

regards
abhiram.


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