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MEMSnet Home: MEMS-Talk: Platinum sputtering conditions
Platinum sputtering conditions
1997-07-29
Joanna Parker
Platinum sputtering conditions
Joanna Parker
1997-07-29
Can anyone recommend some conditions for platinum sputtering such as DC
biasing etc?  Up until now our RF sputterer has rarely been used for metals.
The sputterer also has DC capability so I would like to tune it for optimum
performance with platinum metal.  Any hints?

Jo


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