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MEMSnet Home: MEMS-Talk: Properties of EDP
Properties of EDP
1997-07-29
Martin Geear
Properties of EDP
Martin Geear
1997-07-29
I was wondering if anyone might be able to help ...

I would like some information regarding the flammability of EDP  -  in
particular its flash point.  We use an EDP recipe, similar to the Reisman
Type F solution, for micromachining of silicon substrates.  ie.
approximately 3 litres ethylenediamine,  1 litre water,  1 kg catechol and a
few grammes of pyrazine.  Has anyone measured the flash point of a similar
mixture or is able to give a predictive figure from the constituent
chemicals (ethylenediamine has a flash point 24 degrees C).

Thanks in advance for any help,


Martin Geear

Nortel Optoelectronics
London Road, Harlow
Essex, CM17 9NA, UK

Phone:  +44 1279 403677
FAX:    +44 1279 402765

e-mail: [email protected]


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