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MEMSnet Home: MEMS-Talk: Glass RIE
Glass RIE
2003-04-08
Helen Li
2003-04-09
Martin.WALKER@oxinst.co.uk
adhesion problems
2003-04-10
Rajib Ahmed
2003-04-11
Hongjun Zeng
2003-04-11
Sung Yang
Glass RIE
Helen Li
2003-04-08
Hi,

I am looking for some processing parameter for glass
RIE as reference. My glass contains
SiO2/Na2O/K2O/Al2O3/MgO.

Can anyone with the similar experience of glass RIE
help me?

Thanks,
Helen

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