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MEMSnet Home: MEMS-Talk: info about SU-8 PR.
info about SU-8 PR.
1997-07-30
[email protected]
info about SU-8 PR.
[email protected]
1997-07-30
Hi colleagues,

I am looking for information about how and where to find the following
chemicals:

a) Gamma-Butyloracton (GBL)  - solvent
b) Tri-aryl Sulfonium  - salt
c) PGMEA (Propylene Glycol Methyl Ether Acetate)

These achemicals are to be used in processing of photoresist (SU-8).

Any info will be much appreciated.

Thanks in advance.

Ricky Galhotra
(email: [email protected])


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