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MEMSnet Home: MEMS-Talk: wet-etching of polyimide
wet-etching of polyimide
2003-04-12
Shadyar Farhangfar
2003-04-14
Fariborz Nadi
Stiction tests
2003-04-14
ramji dhakal
2003-04-14
Michael D Martin
2003-04-15
Robert Dean
wet-etching of silver
2003-04-21
Helen Li
2003-04-24
Kirt & Erika Zipf-Williams
2003-04-16
Andy Scholes
2003-04-16
Conor O'Mahony
2003-04-16
anupama@ee.washington.edu
2003-04-17
Mac Daily
wet-etching of polyimide
Michael D Martin
2003-04-14
Not entirely true. There is a group at CERN headed by Fabio Sauli that
regularly wet etches Dupont polyimide foils to make radiation detectors.
Search Nuclear Instruments and Methods (an Elsivier Pub.) for GEMs (Gas
Electron Multipliers). If you the reference maybe you could share them
with us.

-Mike


>>> fnadi@yahoo.com 04/14/03 09:57AM >>>
Is it cured or not? If cured not much can be done, and if it is not you
can not
etch it, only strip it. Do you mean you want to pattern PI with some
other
masking material and then wet etch it?


--- Shadyar Farhangfar  wrote:
> Dear All,
>
> Does anybody happen to know about the wet-etching of
> polyimide? Is there any "standard" etchant to wet-etch
> polyimide layers?
>
> Appreciating any hint,
> Sh.Farhangfar
>
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