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MEMSnet Home: MEMS-Talk: KOH etch question
KOH etch question
1997-08-01
Doug
KOH etch question
Doug
1997-08-01
Could someone please tell me if Permalloy (79 weight% Ni, 19 weight% Fe,
and possbily 4 weight % Mo and 0.3 weight% Mn) is attacked by either KOH
or TMAH?

Thanks.


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