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  • piezoelectric pressure sensing (Ebin Liao)
  • Need Information about Actuator Simulation (Siripon Sukuabol)
  • High resistivity Silicon wafer (Kenneth Smith)
  • Need Information about Actuator Simulation (Vandemeer Jan-r44430)
  • Collected replies on Pad etch (Karen Smith)
  • Re.:Surface Roughness (Andrew F Rutkiewic)
  • about simulation of a stress-induced curved actuator (zhuxiaorui)
  • RE: stressed membrane simulation using ANSYS - mems-talk digest, Vol 1 #89 - 17 msgs (Pancham R. Patel)
  • Need Information about Actuator Simulation (Tom Rust)
  • Etch oxide not Aluminum? (Roger Shile)
  • Vycor7930 (Menhard KOCSIS)
  • Thick SOG (Imad Yousef)
  • MEMS Metrology (Ali Razavi)
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