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Teflon coated pyrex glass wafer bonding (kumar m.v.n buduri)
Fluidic Packaging (Knut Lian)
Teflon foil (Michal Dalog)
Anodic bonding glass-titanium (Niels Olij)
quarts wafers (Nir Pernat)
EPI layer Etching (aslam muhammad)
Plasm-therm RIE temperature (
[email protected]
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silicon 'rounding' etch (Jim Beall)
Pt deposition on glass or silicon (Hongjun Zeng)
EPI layer Etching (Kenneth Smith)
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