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  • Re: PECVD nitride/oxide layer as a mask for KOH silicon etching (Swiss Chen) (Yuanfang Gao)
  • paper presented in Solid-State Sensor and Actuator Workshop, June 1996 (Liviu NICU)
  • Polymer as mechanical structure. (Dr. Helge Bohlmann)
  • wireless accelerometer (Harry Tibbals)
  • Fluorescense-SU-8 (bille@npphotonics (Bill Eaton))
  • TEOS Vendor (Robert C Cole)
  • XeF2 etching (Hsin (Alex) Chang)
  • RE: amorphours silicon's mechnical characteristics. (li gang) (J. Gaspar) (Joao Gaspar)
  • thick aluminum film on wafers ([email protected])
  • Nafion actuator microfabrication (ZHOU WEN LI)
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