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  • spray coating (BERAUER,FRANK (HP-Singapore,ex7))
  • stress free diaphragm structure ([email protected])
  • Re:WTi etching (Anke Stock)
  • refractive index of silicon nitride (Brian Semak)
  • spray coating (Luesebrink Helge)
  • accelerometer design (OFIR DEGANI)
  • adhesion-layers for Au evaportation onto SiN (Oberhammer Joachim)
  • MEMS Dicing question (Jeff Hibner)
  • adhesion-layers for Au evaportation onto SiN (Bill Moffat)
  • adhesion-layers for Au evaporation onto SiN (Justin Borski)
  • MEMS Dicing question (Bill Moffat)
  • MEMS Dicing question (Hanqing Li)
  • adhesion-layers for Au evaportation onto SiN ([email protected])
  • Shadow Mask (Richard Morrison)
  • MEMS Dicing question (Richard Morrison)
  • Shadow masks ([email protected])
  • 3d chip integration (packaging), interconnection and housing in one step (Andrea Reinhardt)
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