MEMS-talk

A MEMS Clearinghouse^® and information portal
for the MEMS and Nanotechnology community

News	MEMSnet Home: MEMS-Talk .. Etch dry oxide (Sungjun Lee) Open MEMS modules (Edward Principe) AZ 9260-100 micron thick resist (martin thornton) pyrex 7740 (Ravi Shankar) about growth of SiN layer on porous silicon? (高晓童) Overlay between front and back of wafer (Mark van der Heijden) Overlay between front and back of wafer (Luesebrink Helge) about growth of SiN layer on porous silicon? (Marc Christophersen) Overlay between front and back of wafer (Shay Kaplan) Alternative to wet etching for glass (Haigh, Richard) AZ 9260-100 micron thick resist (Neal Ricks) Overlay between front and back of wafer (Roger Brennan) AZ 9260-100 micron thick resist (scotttb@umich.edu) contamination risks with spin on dopant? (Aaron Glatzer) contamination risks with spin on dopant? (fwd) (Aaron Glatzer) bridging (Jakob Christoph) pyrex 7740 (Jesse Moreland) Etching another microchannel on a facet of a largerexistingmicrochannel (Michael D Martin) Etch dry oxide (Craig McGray) pyrex 7740 (Susan Coder) Overlay between front and back of wafer (Brubaker Chad) measuring overvolatage (IGOR KADIJA) pyrex 7740 (sp) Removal of Pt black? (Alik Widge) Balzer BAS 450 (R. Brent Garber) (2 parts)
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