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  • Metal Lift off using LOR 20 B and Shipley 1813 (dipankar ghosh)
  • sputter materials on Si02 (Federico)
  • Rép. : [mems-talk] Metal Lift off using LOR 20 B and Shipley 1813 (Laetitia Philippe)
  • RIE Etching of Alumina (Eric Zimney)
  • sputter materials on Si02 (Brent Garber) (2 parts)
  • sputter materials on Si02 (Kirt Williams)
  • Metal Lift off using LOR 20 B and Shipley 1813 (Bill Moffat)
  • wafer level packaging (Brijesh Raut)
  • Metal Lift off using LOR 20 B and Shipley 1813 (Philippe Muller)
  • setting up and optimizing a SF6 RIE process. Hints?Parameters to start with? (Shile)
  • RIE simulation software ([email protected])
  • KOH etching (Booth, David)
  • wafer level packaging (Brubaker Chad)
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