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  • Heating particles in gas-particles flow with microwave frequency (PHILIP LAU)
  • Ag plating (Petru Lunca Popa)
  • Oxidize wafer SOI for litho pattern (Mihaela Carp)
  • Oxidize wafer SOI for litho pattern (Robert Black)
  • 100nm coating for E-beam lith (Gary)
  • Exceeding 200mJ exposure for SU-8 2150 resist (Yue Mun Pun, Jeffrey)
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Process Variations in Microsystems Manufacturing
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Tanner EDA by Mentor Graphics