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  • Metal etching (P.E.M. Kuijpers)
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  • Ni plating on Au film (Petru Lunca Popa)
  • Su 8 thickness (Wei Cheng)
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  • 20um features using AZP4620 (Pradeep Dixit)
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Harrick Plasma
Tanner EDA
Tanner EDA by Mentor Graphics
Harrick Plasma, Inc.
Process Variations in Microsystems Manufacturing
Mentor Graphics Corporation