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  • RIE gold etch rate (Hakemi, Ghazal)
  • RIE gold etch rate (SEBESTA Edward)
  • RIE gold etch rate (Bob Henderson)
  • RIE for SiO2 and its effect on Cr underneath (liuxf)
  • PMMA film (Dazhong Wu)
  • RIE for SiO2 and its effect on Cr underneath (Bob Henderson)
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