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  • Distortion of silicon beam after DRIE process (Jungwook Choi)
  • Dry etch of AlGaAs over InGaP and GaAs (Zhaoyu Zhang)
  • SU8 2050 stress issue (Haixin Zhu)
  • Waveguide polishing (Kasman, Elina)
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Process Variations in Microsystems Manufacturing