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  • Cr/Au as a mask for KOH etch (jian zi)
  • Microchannel fluidic flow rate control (Dongxiao Li)
  • Cr/Au as a mask for KOH etch ([email protected])
  • Carbon nanotube deposition (DongJuan Xi)
  • stress in bulk micromachining (ICP after anodic bonding) (Roger Shile)
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