MEMS-talk

A MEMS Clearinghouse^® and information portal
for the MEMS and Nanotechnology community

News	MEMSnet Home: MEMS-Talk .. low viscosity epoxy (oray orkun cellek) Thermocoupler for Rapid Thermal Annealing (René Fléron) Visit to the Library (Jean Podlecki) wet etchant of Silicon with etch rate in few nm/m in (kirt_williams@agilent.com) measurement of sidewall roughness (Rod Ruoff) Thin PMMA layer (Matthias Kruse) wet etchant of Silicon with etch rate in few nm/min (Bernard Legrand) metal resistant to HCl:HNO3 (Rivas, Isabel) measurement of sidewall roughness (Vic Kley) low viscosity epoxy (Karl Cazzini) metal resistant to HCl:HNO3 (David Nemeth) measurement of sidewall roughness (Vic Kley) Thin PMMA layer (Karl Cazzini) low viscosity epoxy (Maurice Norcott) metal resistant to HCl:HNO3 (Liz Shelley) Equipment for formation of porous silicon (Vidya Sagar) palladium etching (Xing Yang) How to prevent the ethant from creeping along the interface between photoresist and semiconductor material? (Qingwei Mo) measurement of sidewall roughness (Fabrice Morin) Looking for information about mems packaging (jvidal@uaeh.reduaeh.mx) electrostatic pull-in voltage for cantilever beam (LEOW Cheah Wei)
Events
Glossary
Materials
Links
MEMS-talk