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  • RE:Au and Cr dry etching ([email protected])
  • How to peel PDMS off from Si subtrate without tearing PDMS? (Pedro Parracho)
  • CR etchant price? (lbzhou)
  • stiction of contacting surfaces ([email protected])
  • UV-ozone versus O2 plasma (Bill Moffat)
  • UV-ozone versus O2 plasma ([email protected])
  • YSZ thermal barriers for mems (Haigh, Richard)
  • Released MUMPS chip (Glenn Guilford)
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